Petruskevicius, R., Baltrusaitis, J., Kezys, D., Mikolajunas, M., Grigaliunas, V., & Virzonis, D. (2010). E-beam lithography of computer generated holograms using fully vectorial 3D beam propagation method. Microelectronic Engineering, 87(11), 2332-2337. (Original work published 2010)
First name
Raimondas
Last name
Petruskevicius