Mikolajunas, M., Baltrusaitis, J., Kopustinskas, V., Vanagas, G., Grigaliunas, V., & Virzonis, D. (2009). Plasma etching of virtually stress-free stacked silicon nitride films. Thin Solid Films, 517(19), 5769-5772. (Original work published 2009)
First name
G.
Last name
Vanagas