R. Kaliasas

Kaliasas, R., Baltrusaitis, J., Mikolajunas, M., Jakucionis, L., & Virzonis, D. (2012). Scaling down lateral dimensions of silicon nanopillars fabricated by reactive ion etching with Au/Cr self-assembled clusters as an etch mask. Thin Solid Films, 520(6), 2041-2045. (Original work published 2012)

Mikolajunas, M., Kaliasas, R., Andrulevicius, M., Grigaliunas, V., Baltrusaitis, J., & Virzonis, D. (2008). A study of stacked PECVD silicon nitride films used for surface micromachined membranes. Thin Solid Films, 516(23), 8788-8792. (Original work published 2008)