Kaliasas, R., Baltrusaitis, J., Mikolajunas, M., Jakucionis, L., & Virzonis, D. (2012). Scaling down lateral dimensions of silicon nanopillars fabricated by reactive ion etching with Au/Cr self-assembled clusters as an etch mask. Thin Solid Films, 520(6), 2041-2045. (Original work published 2012)
First name
L.
Last name
Jakucionis