Jukna, T., Baltrusaitis, J., Sinkevicius, V., & Virzonis, D. (2008). A thin chromium film formation monitoring method: Monitoring of the early stages. Thin Solid Films, 516(10), 2943-2947. (Original work published 2008)
First name
D.
Last name
Virzonis
Kaliasas, R., Baltrusaitis, J., Mikolajunas, M., Jakucionis, L., & Virzonis, D. (2012). Scaling down lateral dimensions of silicon nanopillars fabricated by reactive ion etching with Au/Cr self-assembled clusters as an etch mask. Thin Solid Films, 520(6), 2041-2045. (Original work published 2012)
Mikolajunas, M., Baltrusaitis, J., Kopustinskas, V., Vanagas, G., Grigaliunas, V., & Virzonis, D. (2009). Plasma etching of virtually stress-free stacked silicon nitride films. Thin Solid Films, 517(19), 5769-5772. (Original work published 2009)
Mikolajunas, M., Kaliasas, R., Andrulevicius, M., Grigaliunas, V., Baltrusaitis, J., & Virzonis, D. (2008). A study of stacked PECVD silicon nitride films used for surface micromachined membranes. Thin Solid Films, 516(23), 8788-8792. (Original work published 2008)